A subsidiary of China Electronics Technology Group Corporation (CETC) has achieved the 28-nanometer full manufacturing process of ion implanters, the CETC said on Thursday.

The ion implanter is the key equipment in chip manufacturing. At present, the 28-nanometer manufacturing process is a mature procedure with the widest coverage in the field of chip application.

The full coverage of the 28-nanometer manufacturing process effectively guarantees domestic chip production and manufacturing, and the industrial safety of China's integrated circuit manufacturing industry in mature manufacturing processes.

Covering 28-nanometer manufacturing process to create semiconductors, the ion implanter puts different chemical elements, in the form of ions with programmed energy, into semiconductor materials to alter the materials' electrical performances.

The CETC subsidiary Electronics Equipment Group has continuously made breakthroughs in the core technologies of key modules such as optical path, control, and software, and forms a full series of ion implanter product patterns, including medium current, high current, high energy implanters and third-generation semiconductors, the CETC said.

'Bottleneck' tech challenge

In March 2021, CETC announced that its independently developed ion implanters could produce 28-nanometer chip wafers, a critical component in China's chipmaking industry, and provide a complete set of solutions for global chip manufacturing companies.

The country used to depend on imported technology for chip manufacturing. However, CETC's successful development of ion implanter products, from medium current, high current and high energy implanters to implanters for special applications and third-generation semiconductors, has boosted China's efforts to achieve self-sufficiency.

Boasting a total of 413 core patents, CETC has achieved a high-end technological breakthrough in ion implanter products and will accelerate research to achieve advanced industrialization, one CETC insider said.

CETC, a state-owned enterprise in China, which was established in March 2002, entered the Fortune Global 500 in 2016.

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(With input from Xinhua)